Handbook of Humidity Measurement, Volume 3

This useful handbook offers an analysis of humidity-sensitive materials along with fabrication and design challenges that may arise in manufacturing and solutions via available new technology. A guide to sensor selection and an overview of the humidity sensor market concludes the work.

Ghenadii Korotcenkov received his PhD in Physics and Technology of Semiconductor Materials and Devices in 1976, and his Habilitate Degree (Dr.Sci.) in Physics and Mathematics of Semiconductors and Dielectrics in 1990. For many years, he was a leader of the Gas Sensor Group, and manager of various national and international scientific and engineering projects carried out in the Laboratory of Micro- and Optoelectronics, Technical University of Moldova. Currently, Dr. Korotcenkov is a research Professor at the Gwangju Institute of Science and Technology, Republic of Korea. His research has included significant work on Schottky barriers, MOS structures, native oxides, and photo receivers on the base of III-Vs compounds. He continues with research in various aspects of materials sciences and surface science, with a particular focus on nanostructured metal oxides and solid state gas sensor design. Dr. Korotcenkov is the author or editor of eleven books and special issues, eleven invited review papers, seventeen book chapters, and more than 190 peer-reviewed articles. His research activities have been honored with the Award of the Supreme Council of Science and Advanced Technology of the Republic of Moldova (2004) and The Prize of the Presidents of the Ukrainian, Belarus and Moldovan Academies of Sciences (2003), among many others.

Section i Humidity-Sensitive Materials Chapter 1 Polymers .................................................................................................................................................................. 3 Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23 Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35 Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51 Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91 Chapter 6 Porous Silicon ...................................................................................................................................................... 109 Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139 Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151 Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163 Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171 Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187 Chapter 12 Supramolecular Materials .................................................................................................................................. 209 Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223 Section ii Sensor technologies and Related Materials Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229 Chapter 15 Fundamentals of Microfabrication Technologies............................................................................................... Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263 Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271 Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281 Chapter 19 Polymer Technologies ........................................................................................................................................ 305 Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339 Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445 Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453