Capacitance Spectroscopy of Semiconductors

Capacitance spectroscopy refers to techniques for characterizing the electrical properties of semiconductor materials, junctions, and interfaces, all from the dependence of device capacitance on frequency, time, temperature, and electric potential. This book includes 15 chapters written by world-recognized, leading experts in the field, academia, national institutions, and industry, divided into four sections: Physics, Instrumentation, Applications, and Emerging Techniques. The first section establishes the fundamental framework relating capacitance and its allied concepts of conductance, admittance, and impedance to the electrical and optical properties of semiconductors. The second section reviews the electronic principles of capacitance measurements used by commercial products, as well as custom apparatus. The third section details the implementation in various scientific fields and industries, such as photovoltaics and electronic and optoelectronic devices. The last section presents the latest advances in capacitance-based electrical characterization aimed at reaching nanometer-scale resolution.

Jian V. Li holds a PhD in electrical engineering from the University of Illinois at Urbana-Champaign, USA. Since 2017, he has been an associate professor at National Cheng Kung University, Taiwan. He specializes in the characterization of semiconductor materials and devices-especially properties concerning defects, carrier recombination, and interfaces-with capacitance spectroscopy and other electrical-optical techniques. Giorgio Ferrari obtained his PhD in electronics engineering in 2003 from the Politecnico di Milano, Italy. Since 2005, he has been an assistant professor of electronics at the Politecnico di Milano. His research concerns the development of novel integrated instrumentation to probe electrical properties of materials, devices, and biosamples at the nanoscale.

Introduction to Capacitance Spectroscopy. Admittance Spectroscopy. Deep-Level Transient Spectroscopy. Capacitance-Voltage and Drive-Level-Capacitance Profiling. Basic Techniques for Capacitance and Impedance Measurements. Advanced Instrumentation for High-Resolution Capacitance and Impedance Measurements. Time-Domain-Based Impedance Detection. Comparison of Capacitance Spectroscopy for PV Semiconductors. Capacitive Techniques for the Characterization of Organic Semiconductors. Capacitance Spectroscopy for MOS Systems. Capacitance Spectroscopy in Single-Charge Devices. Scanning Capacitance Microscopy. Probing the Dielectric Constant at the Nanoscale with Scanning Probe Microscopy. SPM-Based Capacitance Spectroscopy. Scanning Microwave Microscopy.