Handbook of Humidity Measurement, Volume 3

Because of unique water properties, humidity affects materials and many living organisms, including humans. Humidity control is important in various fields, from production management to creating a comfortable living environment. The range of materials that can be used in the development of humidity sensors is very broad, and the third volume of the Handbook of Humidity Measurement offers an analysis on various humidity-sensitive materials and sensor technologies used in the fabrication of humidity sensors and methods acceptable for their testing. Additional features include: - numerous strategies for the fabrication and characterization of humidity-sensitive materials and sensing structures used in sensor applications, - methods and properties to develop smaller, cheaper, more robust, and accurate devices with better sensitivity and stability, - a guide to sensor selection and an overview of the humidity sensor market, and - new technology solutions for integration, miniaturization, and specificity of the humidity sensor calibration.
Handbook of Humidity Measurement, Volume 3: Sensing Materials and Technologies provides valuable information for practicing engineers, measurement experts, laboratory technicians, project managers in industries and national laboratories, and university students and professors interested in solutions to humidity measurement tasks. Despite the fact that this book is devoted to the humidity sensors, it can be used as a basis for understanding fundamentals of any gas sensor operation and development.

Ghenadii Korotcenkov

Section i Humidity-Sensitive Materials Chapter 1 Polymers .................................................................................................................................................................. 3 Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23 Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35 Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51 Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91 Chapter 6 Porous Silicon ...................................................................................................................................................... 109 Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139 Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151 Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163 Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171 Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187 Chapter 12 Supramolecular Materials .................................................................................................................................. 209 Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223 Section ii Sensor technologies and Related Materials Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229 Chapter 15 Fundamentals of Microfabrication Technologies............................................................................................... Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263 Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271 Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281 Chapter 19 Polymer Technologies ........................................................................................................................................ 305 Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339 Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445 Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453