Handbook of Silicon Wafer Cleaning Technology, 2nd Edition

2nd edition. Sprachen: Englisch
Buch (Softcover), 660 Seiten
EAN 9781493303434
Veröffentlicht Januar 2008
Verlag/Hersteller Elsevier Science

Auch erhältlich als:

eBook (epub)
225,00
289,50 inkl. MwSt.
Teilen
Beschreibung

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included. Focused on silicon wafer cleaning techniques including wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. As this book covers the major technologies for removing contaminants, it is a reliable reference for anyone that manufactures integrated circuits, or supplies the semiconductor and microelectronics industries. Covers processes and equipment, as well as new materials and changes required for the surface conditioning process. Editors are two of the top names in the field and are both extensively published. Discusses next generation processing techniques including supercritical fluid, laser, and cryoaerosol."

Hersteller
Libri GmbH
Europaallee 1

DE - 36244 Bad Hersfeld

E-Mail: gpsr@libri.de

Das könnte Sie auch interessieren

Gabriel Yoran
Die Verkrempelung der Welt
eBook (epub)
Sofort lieferbar (Download)
18,99
Sofort lieferbar (Download)
0,00
Sarah Wynn-Williams
Careless People
eBook (epub)
Sofort lieferbar (Download)
15,99
Claus Kühnel
Meshtastic
eBook (epub)
Sofort lieferbar (Download)
29,90
David Pogue
Apple
eBook (epub)
Sofort lieferbar (Download)
19,77
Thomas Schulz
Zukunftsmedizin
eBook (epub)
Sofort lieferbar (Download)
11,99
Hartmut Rosa
Resonanz
eBook (epub)
Sofort lieferbar (Download)
21,99
Sofort lieferbar (Download)
0,00
Christian Westphalen
Die große Fotoschule
eBook (pdf)
Sofort lieferbar (Download)
44,90
Sofort lieferbar (Download)
22,99
Simone Hoffmann
Fotografieren lernen von A bis Z
eBook (pdf)
Sofort lieferbar (Download)
29,90
Adam D'Auria
Fotografieren mit dem Smartphone
eBook (pdf)
Sofort lieferbar (Download)
39,90
Benjamín Labatut
Das blinde Licht
eBook (epub)
Sofort lieferbar (Download)
11,99
Nadine Wagenaar
»Sozialschmarotzerin«
eBook (epub)
Sofort lieferbar (Download)
11,99
Lena Marbacher
Arbeit Macht Missbrauch
eBook (epub)
Sofort lieferbar (Download)
19,99
Leah Carola Czollek
Praxishandbuch Social Justice und Diversity
eBook (pdf)
Sofort lieferbar (Download)
25,99
Elizabeth Anderson
Private Regierung
eBook (epub)
Sofort lieferbar (Download)
19,99
David Graeber
Bullshit Jobs
eBook (epub)
Sofort lieferbar (Download)
13,99
Sofort lieferbar (Download)
0,00
Dennis Eckhardt
Woran arbeiten wir?
eBook (pdf)
Sofort lieferbar (Download)
0,00
John L. Gustafson
The End of Error
eBook (pdf)
Sofort lieferbar (Download)
86,99
Bernhard Kegel
Mit Pflanzen die Welt retten
eBook (epub)
Sofort lieferbar (Download)
10,99
Sofort lieferbar (Download)
0,00
Dietmar Spehr
Digital fotografieren lernen
eBook (pdf)
Sofort lieferbar (Download)
24,90
Elisa Hoven
Das Ende der Wahrheit?
eBook (epub)
Sofort lieferbar (Download)
18,99
Hans-Peter Schaub
Naturfotografie
eBook (pdf)
Sofort lieferbar (Download)
39,90
Rainer Mirau
Österreich fotografieren
eBook (pdf)
Sofort lieferbar (Download)
39,90
Sofort lieferbar (Download)
14,99
Walter Isaacson
Elon Musk
eBook (epub)
Sofort lieferbar (Download)
9,02
Maria Neubauer
Korruption und Schattenwirtschaft
eBook (epub)
Sofort lieferbar (Download)
0,00
James Suzman
Work
eBook (pdf)
Sofort lieferbar (Download)
12,49
Richard David Precht
Freiheit für alle
eBook (epub)
Sofort lieferbar (Download)
12,99
Sofort lieferbar (Download)
8,99
Jean-Claude Ellena
Der geträumte Duft
eBook (epub)
Sofort lieferbar (Download)
13,99
Lars Poeck
Fotografieren in Berlin
eBook (pdf)
Sofort lieferbar (Download)
15,99
Christian Westphalen
Das große Buch der Objektive
eBook (pdf)
Sofort lieferbar (Download)
59,90