Nanocantilever Beams

This book is focused on the fabrication and applications of cantilever beams with nanoscale dimensions. The nanometer-size mechanical structures show exceptional properties generated by their reduced dimensions. These properties enable new sensing concepts and transduction mechanisms that will allow enhancing the performances of the actual devices to their fundamental limits. The book is important because no other books with similar topics focus only on nanocantilever beams. The aim of the book is to provide an excellent reference for an audience with a diversity of backgrounds and interests, including students, academic researchers, industry specialists, policymakers, and enthusiasts.

Mona E. Zaghloul is professor of electrical and computer engineering at the George Washington University, Washington, DC, where she is also director of the Institute of MEMS and VLSI Technologies. She received her PhD in electrical engineering from the University of Waterloo, Waterloo, Canada, in 1975. Prof. Zaghloul received the 50th Gold Jubilee Medal from the IEEE Circuits and Systems Society in recognition for her outstanding contribution to society. She was vice president of the IEEE-CAS Technical Activities (1999-2001) and president of the IEEE Sensors Council for 2008 and 2009. She is a Fellow of the IEEE. Ioana Voiculescu is associate professor in the Mechanical Engineering Department, City College of New York, New York. She received her PhD in mechanical engineering from the Technical University "Politehnica," Timisoara, Romania, and her ScD in mechanical engineering from the George Washington University, Washington, DC, in 2005. Since 2002, Dr. Voiculescu is a member of the American Society of Mechanical Engineers and the Institute of Electrical and Electronics Engineers. She also has two patents in her name.

Part 1: Fabrication techniques of nanocantilver beam. Nanocantilever beam fabrication techniques in silicon. Nanocantilever fabrication techniques in polymer and transduction techniques for nano-electro-mechanical-sensing. Part 2: Nonlinearity of nanocantilever beam resonators. Nonlinear dynamics and its applications in nanocantilevers. Intentional nonlinearity for design of micro/nanomechnical resonators. Part 3: Applications of Nanocantilever beams. Electromechanical properties and applications of carbon nanotube nanocantilevers. Membrane-type Surface Stress Sensor (MSS). Mechanical Properties Characterization of PZT Nanofibers. Micro-and Nanomechanical String Resonators. Optical transduction and actuation of subwavelength nanomechanical resonators. Cantilever resonanace detection using nanophotonic structure. Integrated silicon optmechanical transducers and their application in atomic force microscopy. Nanostuctures for gas sensing applications. Bimaterial nanocantilever beam calormeter for biological application. Advances and challenges to bring nanomechanical biosensors to biochemistry labs and clinical use. Nanocantilever beam as biological sensors. Micro/nano Mechanical Cantilever for Cancer Diagnosis.