Handbook of Mems for Wireless and Mobile Applications

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems.- Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications- Discusses wireless techniques and applications of wireless MEMS, including biomedical applications- Describes monitoring structures and the environment with wireless MEMS

Contributor contact detailsWoodhead Publishing Series in Electronic and Optical MaterialsDedicationPrefacePart I: RF MEMS as an enabling technology for wireless applicationsChapter 1: Overview of RF MEMS technology and applicationsAbstract:1.1 Introduction1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations1.3 RF MEMS design challenges1.4 RF MEMS applications1.5 Conclusion1.6 Sources of further information and advice1.7 AcknowledgementsChapter 2: Overview of wireless techniques for use with MEMSAbstract:2.1 Introduction2.2 Transport layer issues2.3 Network layer mobility issues2.4 Data-link layer2.5 Physical layer2.6 The wireless link budget2.7 Physical layer system design2.8 ConclusionChapter 3: RF MEMS fabrication technologiesAbstract:3.1 Introduction3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses3.3 Technologies for smart RF MEMS3.4 Highlights on specific key steps in RF MEMS fabrication3.5 Towards integrated technology for microsystem implementation3.6 Emerging technologies in wireless applications3.7 Conclusion3.8 AcknowledgementsChapter 4: RF MEMS passive components for wireless applicationsAbstract:4.1 Introduction4.2 RF MEMS passive components and their applications4.3 High-performance passive components enabled by RF MEMS technology4.4 Complex networks based on RF MEMS passive components4.5 ConclusionChapter 5: RF MEMS phase shifters for wireless applicationsAbstract:5.1 Introduction5.2 Switched-line phase shifter5.3 Loaded-line phase shifter5.4 Reflection-type phase shifter5.5 Distributed-line phase shifter5.6 Mixed-architectures and exotic phase shifters5.7 Towards global manufacturing5.8 Applications5.9 ConclusionChapter 6: RF MEMS antennas for wireless applicationsAbstract:6.1 Introduction6.2 RF MEMS antennas6.3 Reconfigurable feeding networks6.4 Reconfigurable antennas6.5 Design considerations6.6 Conclusion and future trends6.7 Sources of further information and adviceChapter 7: RF MEMS-based wireless architectures and front-endsAbstract:7.1 Introduction7.2 Communication standards7.3 Receivers, transmitters and transceivers: basic architectures7.4 Conventional component technology7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture7.6 Diversity in receivers and transmitters7.7 Multi-input multi-output (MIMO) systems7.8 Systems-on-a-chip7.9 ConclusionChapter 8: RF MEMS technology for next-generation wireless communicationsAbstract:8.1 Introduction8.2 RF MEMS technology8.3 RF MEMS technology for high-performance passive components8.4 Technology platform for the fabrication of RF MEMS complex circuits8.5 Some examples of high-performance devices enabled by the RF MEMS technology8.6 ConclusionChapter 9: Wafer-level packaging technology for RF MEMSAbstract:9.1 Introduction9.2 Wafer -level zero-level packaging for RF MEMSSS9.3 Electrical effects of the packaging material on the packaged devices9.4 Packaging with hard cap materials9.5 Packaging with a polymer cap9.6 ConclusionChapter 10: Reliability of RF MEMSAbstract:10.1 Introduction10.2 Overview of failure mechanisms in RF MEMS10.3 Charging in RF MEMS10.4 Analytical modelling10.5 Electrostatic discharge10.6 Reliability issues of MEMS packages10.7 ConclusionPart II: Wireless techniques and applications of wireless MEMSChapter 11: Energy harvesters for powering wireless systemsAbstract:11.1 Introduction11.2 Kinetic energy harvesters11.3 Design of kinetic energy harvesters11.4 Other typologies of energy harvesters11.5 Conclusion11.6 References11.7 Appendix: list of symbolsChapter 12: MEMS wireless implantable systems: historical review and perspectivesAbstract:12.1 Introduction12.2 Basic considerations and characteristics of wireless MEMS implantable systems12.